制藥網(wǎng)
詳細(xì)介紹
OAI UV Led 光源-對(duì)準(zhǔn)和均勻，適用于高要求的光刻應(yīng)用。
BENEFIT 好處
Low Cost 低成本
Long Life 壽命長(zhǎng)
Energy Efficient 高效率能源
Low Power Usage 低功率使用
No maintenance costs or lamp changes 沒(méi)有維護(hù)費(fèi)用或更換燈管
No Mercury. 沒(méi)有汞
OPTIONS 選項(xiàng)
Free standing or can be integrated into any OAI 獨(dú)立或可集成到任何OAI
lithography system 光刻系統(tǒng)
Variety of tooling modules available 可提供多種模具模塊
Height adjustable LS stａnd available 高度可調(diào)的LS站
Single or multiple wavelength 單波長(zhǎng)或多波長(zhǎng)
FEATURES 特性
Beam size 4” to 12” sg. 尺寸為4 "到12 " sg
Wave length 365um, 405um or dual wave length 波長(zhǎng)365um, 405um或雙波長(zhǎng)
Dual Wave Length Tuning available 可進(jìn)行雙波長(zhǎng)調(diào)協(xié)
Beam uniformity better than +/- 4% 光束均勻性優(yōu)于+/- 4%
Beam intensity up to ~25mW/cm2 光束強(qiáng)度可達(dá)~25mW/cm2
Easy to use touch screen interface 易于使用的觸摸屏界面
Collimation angle <= 2 degrees 準(zhǔn)直角< <= 2度
Dose control and timed exposure 劑量控制和定時(shí)曝光
USB remote interface for PC control USB遠(yuǎn)程接口的PC控制
Long working 長(zhǎng)時(shí)間的工作
Tooling Module
Using UV Led Light
Source: 0.5um
Lines and Space
制藥網(wǎng)