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Aerotech的 ABRT 系列空氣軸承精密直驅(qū)轉(zhuǎn)臺(tái)提供的角度定位,速度穩(wěn)定性和運(yùn)動(dòng)性能,并且擁有令人印象深刻的有效負(fù)載能力及出色的軸向和徑向剛性。該ABRT精密轉(zhuǎn)臺(tái)是專為滿足DVD母盤,晶圓檢測(cè),高精度測(cè)量應(yīng)用,X射線衍射系統(tǒng),光學(xué)檢測(cè)和制造,以及微型機(jī)電系統(tǒng)(MEMS)/納米器件制造的嚴(yán)格要求。
● 高扭矩輸出,直接驅(qū)動(dòng),無(wú)槽無(wú)刷伺服電機(jī)
● 零齒槽效應(yīng)電機(jī)提供優(yōu)秀的速度穩(wěn)定性
● 的運(yùn)動(dòng)和擺動(dòng)性能
● 直接耦合的高精確度旋轉(zhuǎn)編碼器
● 大口徑通孔
● 無(wú)機(jī)械接觸
The ABRT design features large air-bearing surfaces and innovative preloading for high stiffness and load capacity, producing not only excellent axial and radial error motions, but outstanding tilt error motion, as well. The resultant performance is significantly better than other rotary air-bearing tables and spindles, greatly benefiting applications requiring exceptional planar performance. Furthermore, this stage family provides a clear aperture that can be used for product feed-through, laser beam delivery, cable clearance or application-specific requirements.
To maximize positioning performance, the ABRT series utilizes optimized versions of Aerotech S-series slotless, brushless motor. The motor uses an advanced magnetic circuit design to produce high torque output with minimal heat generation. The slotless design is inherently zero-cogging and torque-ripple-free. This makes ABRT stages ideal for applications requiring smooth scan velocities at low or high speeds.
Custom versions of the ABRT are available to satisfy rate table and high precision inertial guidance test-stand applications. Other features, such as slip rings and rotary unions, are available.
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