4200A-SCS-PK1參數(shù)分析儀

親眼見證創(chuàng)新！ 4200A-SCS 是一種可以量身定制、全面集成 的參數(shù)分析儀，可以同步查看電流電壓(I-V)、電容電壓(C-V) 和超快速脈沖式I-V 特性。作為性能的參數(shù)分析儀， 4200A-SCS 加快了半導(dǎo)體、材料和工藝開發(fā)速度。

4200A-SCS ClariusTM 基于GUI 的軟件提供了清楚的、不折不 扣的測量和分析功能。憑借嵌入式測量專業(yè)知識和數(shù)百項(xiàng)隨時 可以投入使用的應(yīng)用測試，Clarius Software 可以更深入地挖掘 研究過程，快速而又滿懷信心。

4200A-SCS 參數(shù)分析儀可以根據(jù)不同用戶需求進(jìn)行靈活配 置，不管是現(xiàn)在還是未來，都可以隨時對系統(tǒng)進(jìn)行升級。通過 4200A-SCS 參數(shù)分析儀，通往發(fā)現(xiàn)之路現(xiàn)在變得異常簡便。

主要性能指標(biāo)

I-V 源測量單元(SMU)

• ± 210 V/100 mA 或 ± 210 V/1 A 模塊

• 100 fA測量分辨率

• 選配前端放大器提供了 10 aA測量分辨率

• 10 mHz - 10 Hz 超低頻率電容測量

• 四象限操作

• 2 線或 4 線連接

C-V 多頻率電容單元(CVU)

• AC 阻抗測量 (C-V, C-f, C-t)

• 1 kHz - 10 MHz 頻率范圍

• ± 30 V (60 V差分)內(nèi)置DC偏置源，可以擴(kuò)展到± 210 V(420 V 差分)

• 選配 CVIV 多通道開關(guān)，在 I-V 測量和 C-V 測量之間簡便切換脈沖式I-V 超快速脈沖測量單元(PMU)

• 兩個獨(dú)立的或同步的高速脈沖 I-V 源和測量通道

• 200 MSa/s，5 ns 采樣率

• ±40 V (80 V p-p)，±800 mA

• 瞬態(tài)波形捕獲模式

• 任意波形發(fā)生器 Segment ARB® 模式，支持多電平脈沖波形，10 ns 可編程分辨率

高壓脈沖發(fā)生器單元(PGU)

• 兩個高速脈沖電壓源通道

• ±40 V (80 V p-p)，± 800 mA

• 任意波形發(fā)生器 Segment ARB®模式，支持多電平脈沖波形，10 ns 可編程分辨率I-V/C-V 多通道開關(guān)模塊 (CVIV)

• 在 I-V測量和 C-V 測量之間簡便切換，無需重新布線或抬起探針

• 把 C-V測量移動到任意端子，無需重新布線或抬起探針遠(yuǎn)程前端放大器/ 開關(guān)模塊(RPM)

• 在 I-V 測量、C-V 測量和超快速脈沖 I-V 測量之間自動切換

• 把 4225-PMU的電流靈敏度擴(kuò)展到數(shù)十皮安

• 降低電纜電容效應(yīng)

Witness innovation! The 4200a-scs is a customizable, fully integrated parameter analyzer that can synchronously view current and voltage (i-v), capacitive voltage (c-v), and ultra-fast pulse i-v characteristics. As the highest performing parameter analyzer, the 4200a-scs speeds up the development of semiconductors, materials and processes.

The 4200a-scs ClariusTM gui-based software provides clear, unbroken measurement and analysis functions. With embedded measurement expertise and hundreds of application tests ready for use at any time, Clarius Software can dig deeper into the research process quickly and confidently.

The 4200a-scs parameter analyzer can be flexibly configured according to the needs of different users, and the system can be upgraded at any time no matter it is now or in the future. With the 4200a-scs parameter analyzer, the path to discovery is now incredibly simple.

Key performance indicators

I-v source measurement unit (SMU)

210 V/100 mA or 210 V/1 A module

100 fA measurement resolution

The optional front-end amplifier provides a 10 aA measurement resolution

Measurement of ultra-low frequency capacitance at 10 mhz-10 Hz

Four quadrant operation

Connect 2 or 4 wires

C-v multi-frequency capacitor unit (CVU)

AC impedance measurement (c-v, c-f, c-t)

1 khz-10 MHz frequency range

Built-in DC offset source, expandable to 210 V(420 V difference)

Optional CVIV multi-channel switch, simple switching between i-v measurement and c-v measurement pulse i-v ultra-fast pulse measurement unit (PMU)

Two independent or synchronous high-speed pulse i-v sources and measurement channels

200 MSa/s, 5 ns sampling rate

40 V (80 V p-p), 800 mA

Transient waveform capture mode

Arbitrary waveform generator Segment ARB ® model, supporting multilevel pulse waveform, 10 ns programmable resolution

High voltage pulse generator unit (PGU)

Two high speed pulsed voltage source channels

40 V (80 V p-p), 800 mA

Arbitrary waveform generator Segment ARB ® model, supporting multilevel pulse waveform, 10 ns programmable resolution I - V/C - V multi-channel switch module (CVIV)

Easy switching between i-v measurements and c-v measurements without rewiring or lifting the probe

Move the c-v measurement to any terminal without rewiring or lifting the probe remote front-end amplifier/switch module (RPM)

Automatic switching between i-v measurement, c-v measurement and ultra-fast pulse i-v measurement

The current sensitivity of 4225-pmu was extended to tens of picoamps

Reduce the cable capacitance effect