超微力臺(tái)階儀/膜厚儀

 超微力臺(tái)階儀/膜厚儀

Stylus Surface Profilometers

簡(jiǎn)介： 

超微力臺(tái)階儀/膜厚儀Alpha-Step IQ是探針接觸式表面輪廓儀(臺(tái)階儀.膜厚儀)，常用于film薄膜,厚膜thick film,FPD裂變產(chǎn)物探測(cè),LCD液晶面板,TP終端處理器,CF,MEMS微型機(jī)電系太陽(yáng)能,LED,光電子，統(tǒng)等微納米/力領(lǐng)域測(cè)量

型號(hào)

• Provides advanced and customizable 2D surface profiling analysis capabilities
• Enables easy location of surface profiling measurement features via saved site image with recipe.
• Features excellent surface profiling process repeatability and reproducibility.
• Precisely determines and analyzes thin step heights, surface microroughness, and overall form error on thin film surface coatings.
• Provides sufficient vertical range for large topography variations.
• Includes multiple language support for users with a worldwide presence.
• Enables faster surface profiling analysis routines by applying saved sets of surface profiling analysis instructions.

Comprehensive Surface Profiler Solutions 
The P-16 and P-16OF (3D benchtop surface profiler), Alpha-Step IQ (2D benchtop surface profiler),HRP 350 series (high resolution surface profiler) provide comprehensive surface metrology analysis and surface topography control solutions to meet the needs of the most demanding surface profiling applications.

The Alpha-Step IQ is a state-of-the-art, stylus-based surface profiler that combines high measurement precision with versatility and economy. This third generation Alpha-Step IQ is Ideal for applications such as pilot lines and materials research, enabling fast process learning and high yields. With guaranteed 7.5 ? (1σ) or 0.1% step height repeatability and sub-angstrom

resolution, the Alpha-Step IQ provides excellent repeatability and performance

to analyze and monitor processes. This system offers the most complete suite of two-dimensional analysis features for surface topography analysis on a variety

of surfaces including wafers, MEMS, ceramics, SIMS craters, micro lenses, hard disks and displays. The system is controlled by a fast and more powerful computing platform than previous Alpha-Step IQ versions, offering networking and USB communications.

APPLICATIONS

Ideal for pilot lines, R&D, and Industrial quality processes, the Alpha-Step IQ provides all the tools necessary to analyze a variety of surfaces and applications:

??Film Thickness/Etch

??SIMS Crater

??MEMS

??Optoelectronics

??Ceramics

??Industrial Machining

Data Storage

PRODUCT DESCRIPTION

Step Height RepeatabilityThe Alpha-Step IQ’s specified guaranteed step height epeatability makes it easier to precisely measure thin step heights, surface micro roughness, and etch depth on a wide variety of surfaces extending below 80 ? and up to 2 mm step heights. This performance is ensured by modern ultra-low-noise electronics and precision mechanical components. Stylus scanning motion provides exceptional measurement stability for extremely repeatable measurements.Powerful Data AnalysisUser-selectable filters can be applied to the scan data to separate oughness and waviness components for individual analysis. Up to 48 surface parameters can be selected for analysis. Additionally, the Alpha-Step IQ offers an array of intelligent algorithms for automatic leveling and multiple step height detection. Data can be saved or exported as ASCII, AS IQ binary, or as older generation AS-500 binary type. The Alpha-Step IQ is using the same data analysis platform used on the higher end pro

Alpha-Step超微力臺(tái)階儀/膜厚儀接觸式為基礎(chǔ)表面分析器將高測(cè)量精度與多功能性和經(jīng)濟(jì)。適用于各種表面，包括：半導(dǎo)體硅片、MEMS、微電子陶瓷、SIMS、光學(xué)表面和平面顯示。Alpha-Step IQ 另外還提供了豐富的選件，如：更高的垂直測(cè)量范圍、用于樣品定位的更大倍率的攝象頭機(jī)、集成的數(shù)據(jù)處理軟件和支持多語(yǔ)言顯示等等，以滿(mǎn)足用戶(hù)各種不同的需求。計(jì)算機(jī)化的系統(tǒng)更提供了聯(lián)網(wǎng)和USB通訊的強(qiáng)大功能。Alpha-Step IQ 能幫助您更及時(shí)地了解工藝狀況以及提高產(chǎn)量。以保證8…(1σ)或0.1%階梯高度重復(fù)性和sub-angstrom決議,Alpha-Step智商表面分析器提供了很好的可重復(fù)性和性能分析和監(jiān)控表面分析流程。

     超微力臺(tái)階儀/膜厚儀

• 提供*的和可定制的2 d表面分析分析功能
• 使簡(jiǎn)單的表面分析測(cè)量的位置特性與配置通。
• 具有優(yōu)秀的表面分析過(guò)程可重復(fù)性和再現(xiàn)性。
• 高度精確地確定和分析薄步驟,推導(dǎo)出表面,整體形狀誤差在薄膜表面涂料。
• 提供足夠的垂直距離大地形變化。
• 包括多種語(yǔ)言支持用戶(hù)。
• 允許更快的表面分析分析例程通過(guò)應(yīng)用保存套表面分析分析指令。

歡迎超微力臺(tái)階儀/膜厚儀